Download PDF by Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas: CMOS Hotplate Chemical Microsensors

By Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann

ISBN-10: 3642089100

ISBN-13: 9783642089107

The ebook "CMOS Hotplate Chemical Microsensors" presents a complete therapy of the interdisciplinary box of CMOS technology-based chemical microsensor platforms, and, specifically, of microhotplate-based structures. The e-book is, at the one hand, precise at scientists and engineers which are attracted to getting first insights within the box of microhotplates and similar chemical sensing, for the reason that all worthy primary wisdom is incorporated. nonetheless, it additionally addresses specialists within the box because it offers unique info on all very important matters on the topic of knowing microhotplates and, in particular, microhotplate-based chemical sensors in CMOS technology.A huge variety of microhotplate realizations and integrated-sensor-system implementations illustrate the present state-of-the-art and, even as, supply an influence of the long run power of chemical microsensors in CMOS know-how. when you consider that microsensors produce "microsignals", sensor miniaturization with out sensor integration is, in lots of instances, vulnerable to failure. This e-book can help to bare the advantages of utilizing built-in electronics and CMOS-technology for constructing microhotplates and the corresponding chemical microsensor platforms and, specifically, the benefits that end result from figuring out monolithically built-in sensor structures comprising transducers and linked circuitry on a unmarried chip.

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Extra resources for CMOS Hotplate Chemical Microsensors

Example text

8) vanishes. The membrane consists of a stack of thin films of a certain thickness, di , with characteristic isotropic and homogeneous material constants ci and κi (see Fig. 2). The composition of the stack locally depends on the x,y-coordinates. 14) i and varies according to the microhotplate structure. , ambient temperature, corresponding to the unheated state of the microhotplate. βi is the first-order temperature coefficient of the heat conductivity and ΔT = T − T . 3 FEM-Simulations 23 The heat on the hotplate is generated by resistive Joule heating, pJoule .

The membrane temperature before applying any heating power. 25) T The thermal resistance will be temperature-dependent as can be seen in Eq. 24), which is not only a consequence of the temperature dependence of the thermal heat conduction coefficients. The measured membrane temperature, TM , is related to the location of the temperature sensor, so that the temperature distribution across the heated area will also influence the thermal resistance value. The nonlinearity in Eq. 24) is, nevertheless, small.

Therefore, an array of temperature sensors was integrated on the hotplate to assess the temperature distribution. The temperature sensors (nominal resistance of  kΩ) were placed in characteristic locations on the microhotplate, which were numbered T to T . The measurement results have been compared to the corresponding values of a FEM simulation in Sect. 2, and the validity of the model for simulations of the temperature distribution has been established. Instead of a silicon island underneath the dielectric layer, a polysilicon plate can be placed in the membrane center.

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CMOS Hotplate Chemical Microsensors by Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann


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